000 00985nam a2200277 a 4500
001 vtls000093134
003 KUKTEM
005 20251125103108.0
008 151212t2015 flua f 001 0 eng d
020 _a9781466517288 (hbk.)
039 9 _a201602111522
_baida
_y201512121141
_zfaiz
040 _aUMP
090 _aTA455 .P58 N35 2015
100 1 _aNakamura, Kenichiro
245 1 0 _aPhotopolymers :
_bphotoresist materials, processes, and applications /
_cKenichiro Nakamura
260 _aBoca Raton, FL :
_bCRC Press,
_cc2015
300 _aix, 179 p. :
_bill. ;
_c24 cm.
490 0 _aOptics and photonics ;
_vv. 10
504 _aIncludes bibliographical references and index
650 0 _aPhotopolymers
650 0 _aPhotoresists
650 0 _aPhotopolymerization
650 0 _aPhotopolymers
_xIndustrial applications
650 0 _aMicroelectronics
_xMaterials
999 _aVIRTUA40
_c82172
_d82178
999 _aVTLSSORT0080*0200*0400*0900*1000*2450*2600*3000*4900*5040*6500*6501*6502*6503*6504*9992