000 00850nam a2200229 a 4500
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003 KUKTEM
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008 160523t2014 xxka f 001 0 eng d
020 _a9780857095268
039 9 _a201606271512
_bzul
_c201606161154
_dzul
_y201605231036
_zepul
040 _aUMP
090 _aTK7871.15.S55 S55 2014
245 0 0 _aSilicon-on-insulator (SOI) technology :
_bmanufacture and applications /
_cedited by Oleg Kononchuk, Bich-Yen Nguyen
260 _aCambridge, UK :
_bWoodhead Publishing,
_c2014
300 _axxii, 474 p :
_bill. ;
_c24 cm.
504 _aIncludes bibliographical references and index
650 0 _aSilicon-on-insulator technology
700 1 _aKononchuk, Oleg
700 1 _aNguyen, Bich-Yen
999 _aVIRTUA40
_c83733
_d83739
999 _aVTLSSORT0080*0200*0400*0900*2450*2600*3000*5040*6500*7000*7001*9992