000 01030nam a2200265 a 4500
001 vtls000097858
003 KUKTEM
005 20251125103401.0
008 160922t2016 flua f 001 0 eng d
020 _a9781498700122 (hbk.)
039 9 _a201905021334
_bAUTHORITY
_c201905021331
_dAUTHORITY
_c201701091134
_dfateeha
_y201609220957
_zazli
040 _aUMP
090 _aTP754 .R69 2016
100 1 _aRoy, Sunipa
245 1 0 _aMEMS and nanotechnology for gas sensors /
_cSunipa Roy and Chandan Kumar Sarkar
260 _aBoca Raton, FL :
_bCRC Press, Taylor & Francis Group,
_c2016
300 _axvii, 224 p. :
_bill. ;
_c24 cm.
504 _aIncludes bibliographical references and index
650 0 _aGas detectors
_x‬Design and construction
650 0 _aMicroelectromechanical systems
_xDesign and construction
650 0 _aMicrofabrication
650 0 _aNanomanufacturing
700 1 _aSarkar, Chandan Kumar
999 _aVIRTUA40
_c84872
_d84878
999 _aVTLSSORT0080*0200*0400*0900*1000*2450*2600*3000*5040*6500*6501*6502*6503*7000*9992