| 000 | 00993nam a2200265 a 4500 | ||
|---|---|---|---|
| 001 | vtls000096436 | ||
| 003 | KUKTEM | ||
| 005 | 20251125103509.0 | ||
| 008 | 160621t2015 flua f 001 0 eng d | ||
| 020 | _a9781482232813 (hbk.) | ||
| 020 | _a1482232812 | ||
| 039 | 9 |
_a201905021334 _bAUTHORITY _c201610261157 _dsafura _y201606211221 _zazli |
|
| 040 | _aUMP | ||
| 090 | _aTK7871.15.S55 E73 2015 | ||
| 100 | 1 | _aEranna, G. | |
| 245 | 1 | 0 |
_aCrystal growth and evaluation of silicon for VLSI and ULSI / _cGolla Eranna |
| 260 |
_aBoca Raton : _bCRC Press, Taylor & Francis Group, _c2015 |
||
| 300 |
_axvii, 141 p. : _bill. ; _c26 cm. |
||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 |
_aIntegrated circuits _xUltra large scale integration _xMaterials |
|
| 650 | 0 |
_aSilicon crystals _xTesting |
|
| 650 | 0 | _aCrystal growth | |
| 650 | 0 |
_aSemiconductor wafers _xMaterials |
|
| 999 |
_aVIRTUA40 _c85915 _d85921 |
||
| 999 | _aVTLSSORT0080*0200*0201*0400*0900*1000*2450*2600*3000*5040*6500*6501*6502*6503*9992 | ||