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008 171017t20162011ne a f 001 0 eng d
020 _a9780323378284
_qhardback
039 9 _a201905081615
_bAUTHORITY
_c201803051246
_dnazri
_y201710171006
_zfaiz
040 _aUMP
_beng
_cUMP
_erda
090 _aTJ1191.5 .L88 2016
100 1 _aLuttge, Regina,
_eauthor.
245 1 0 _aNano- and microfabrication for industrial and biomedical applications /
_cRegina Luttge
250 _aSecond Edition
264 4 _c© 2011
264 1 _aAmsterdam :
_bElsevier/William Andrew,
_c2016
300 _axvii, 259 pages :
_billustrations ;
_c24 cm.
336 _atext
_2rdacontent
337 _aunmediated
_2rdamedia
338 _avolume
_2rdacarrier
490 1 _aMicro and nano technologies series
504 _aIncludes bibliographical references and index
650 0 _aMicrofabrication
650 0 _aManufacturing processes
830 0 _aMicro and nano technologies series
999 _aVIRTUA40
_c88302
_d88308
999 _aVTLSSORT0080*0200*0400*0900*1000*2450*2500*2641*2640*3000*3360*3370*3380*4900*5040*6500*6501*8300*9992