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008 190627s2020 sz a fsb 000 0 eng d
020 _a9783030214968
_qebook
040 _aN$T
_beng
_cUMP
_erda
090 _aTK7875 .D53 2020
100 1 _aDi Barba, Paolo,
_eauthor.
245 1 0 _aMEMS :
_bfield models and optimal design / \
_cPaolo Di Barba, Slawomir Wiak
264 1 _aCham, Switzerland :
_bSpringer,
_c2020
300 _a1 online resource
336 _atext
_2rdacontent
337 _acomputer
_2rdamedia
338 _aonline resource
_2rdacarrier
490 1 _aLecture notes in electrical engineering
504 _aIncludes bibliographical references
650 0 _aMicroelectromechanical systems
650 0 _aMicroelectromechanical systems
_xDesign and construction
650 0 _aMicroelectromechanical systems
_xMathematical models
700 1 _aWiak, S.,
_0http://id.loc.gov/authorities/names/no2002101468
_eauthor.
830 0 _aLecture notes in electrical engineering
856 4 0 _uhttps://link-springer-com.libraryumpsa.idm.oclc.org/book/10.1007/978-3-030-21496-8
_zOff-Campus link
856 4 0 _uhttps://www.springer.com/gp/book/9783030214951
_zClick here to access (Direct Link)
942 _2lcc
_cEBOOK