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| 008 | 210129s2020 S ||||fs|||| 000 0 eng d | ||
| 020 |
_a9783030486020 _qebook |
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| 040 |
_aWorldCat _beng _cUMP _erda |
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| 090 | _aTK7871.85 .D54 2020 | ||
| 245 | 0 | 0 |
_aDigital transformation in semiconductor manufacturing : _bproceedings of the 1st and 2nd european advances in digital transformation conference, EADTC 2018, Zittau, Germany and EADTC 2019, Milan, Italy / _cedited by Sophia Keil, Rainer Lasch, Fabian Lindner, Jacob Lohmer |
| 264 | 1 |
_aCham : _bSpringer, _c2020 |
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| 300 | _a1 online resource | ||
| 336 |
_atext _2rdacontent |
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| 337 |
_acomputer _2rdamedia |
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| 338 |
_aonline resource _2rdacarrier |
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| 490 | 1 | _aLecture notes in electrical engineering | |
| 650 | 0 |
_aSemiconductors _vCongresses |
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| 650 | 0 |
_aSemiconductor industry _vCongresses |
|
| 700 | 1 |
_aKeil, Sophia, _eeditor. |
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| 700 | 1 |
_aLasch, Rainer, _eeditor. |
|
| 700 | 1 |
_aLindner, Fabian, _eeditor. |
|
| 700 | 1 |
_aLohmer, Jacob, _eeditor. |
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| 830 | 0 | _aLecture notes in electrical engineering | |
| 856 | 4 | 0 |
_uhttps://link-springer-com.libraryumpsa.idm.oclc.org/book/10.1007/978-3-030-48602-0 _zOff-Campus link |
| 856 | 4 | 0 |
_uhttps://link.springer.com/book/10.1007/978-3-030-48602-0 _zClick here to access (Direct Link) |
| 942 |
_2lcc _cEBOOK |
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