| 000 | 01070nam a2200313 i 4500 | ||
|---|---|---|---|
| 999 |
_c99171 _d99177 |
||
| 003 | MY-KuUP | ||
| 005 | 20251125110246.0 | ||
| 006 | a||||fr|||| 001 0 | ||
| 007 | ta | ||
| 008 | 230314t20172017-uka|||fr|||| 001 0 eng d | ||
| 020 |
_a9781788021470 _qpaperback |
||
| 020 |
_a1788021479 _qpaperback |
||
| 040 |
_aMalcat _beng _cUMP _erda |
||
| 090 | _aTK7871.85 .T96 2017 f | ||
| 245 | 1 | 0 |
_aMaterials science in semiconductor processing / . _cKurbangali B. Tynyshtykbaev, Talant Aitmukan, et al |
| 264 | 1 |
_aUnited Kingdom : _bAuris Reference Limited, _c2017 |
|
| 264 | 4 | _c©2017 | |
| 300 |
_aix, 190 pages : _billustration; _c31 cm |
||
| 336 |
_2rdacontent _atext |
||
| 337 |
_2rdamedia _aunmediated |
||
| 338 |
_2rdacarrier _avolume |
||
| 504 | _aIncludes bibliographical references and index | ||
| 650 | 0 | _aSemiconductors. | |
| 650 | 0 |
_aIntegrated circuits _xMaterials |
|
| 700 | 1 | _aTynyshtykbaev, Kurbangali B. | |
| 700 | 1 | _aAitmukan, Talant. | |
| 942 |
_2lcc _cOPEN |
||