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Handbook of semiconductor manufacturing technology /

Handbook of semiconductor manufacturing technology / edited by Yoshio Nishi, Robert Doering; assistant editor Tim Wooldridge - New York : Marcel Dekker, 2000

Includes bibliographical references and index

ISBN: 0824787838

Subjects--Topical Terms:
Semiconductors--Design and construction--Handbooks, manuals, etc
Semiconductor industry--Handbooks, manuals, etc

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