Handbook of semiconductor manufacturing technology / (Record no. 12381)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00938nam a2200229 a 4500 |
| 001 - CONTROL NUMBER | |
| control field | vtls000005107 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | KUKTEM |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20251117141156.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 060606t2000 nyu f 001 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0824787838 |
| 039 #9 - LEVEL OF BIBLIOGRAPHIC CONTROL AND CODING DETAIL [OBSOLETE] | |
| Level of rules in bibliographic description | 201111240818 |
| Level of effort used to assign nonsubject heading access points | Fida |
| Level of effort used to assign subject headings | 201107131705 |
| Level of effort used to assign classification | VLOAD |
| Level of effort used to assign subject headings | 201102081455 |
| Level of effort used to assign classification | Fida |
| Level of effort used to assign subject headings | 200908141030 |
| Level of effort used to assign classification | VLOAD |
| -- | 200606141121 |
| -- | VLOAD |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | UMP |
| 245 00 - TITLE STATEMENT | |
| Title | Handbook of semiconductor manufacturing technology / |
| Statement of responsibility, etc. | edited by Yoshio Nishi, Robert Doering; assistant editor Tim Wooldridge |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | New York : |
| Name of publisher, distributor, etc. | Marcel Dekker, |
| Date of publication, distribution, etc. | 2000 |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE | |
| Bibliography, etc. note | Includes bibliographical references and index |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Semiconductors |
| General subdivision | Design and construction |
| Form subdivision | Handbooks, manuals, etc |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Semiconductor industry |
| Form subdivision | Handbooks, manuals, etc |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Nishi, Yoshio |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Doering, Robert |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Wooldridge, Tim |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Date acquired | Total checkouts | Full call number | Barcode | Date last seen | Copy number | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Not lost | Not for loan | UMPLIB PEKAN | UMPLIB PEKAN | 04/09/2019 | TK7871.85 .H36 2000 r | 0000004988 | 04/09/2019 | 1 | 04/09/2019 | Reference |