Advanced MEMS packaging
Advanced MEMS packaging [electronic resource] /
John H. Lau ... [et al.]
- New York : McGraw-Hill, c2010
- 1 online resource (xxiii, 552 p.) : ill.
Description based on print version record
Includes bibliographical references and index
Enabling technologies for advanced MEMS packaging -- Advanced MEMS wafer-level packaging -- Optical MEMS packaging : communications -- Optical MEMS packaging : bubble switch -- Optical MEMS : microbolometer packaging -- Bio-MEMS packaging -- Biosensor packaging -- Accelerometer packaging -- Radiofrequency MEMS switches -- RF MEMS tunable capacitors and tubable band-pass filters -- Advanced packaging of RF MEMS devices
Mode of acceess : Internet
9780071627924 (NetLibrary e-ISBN) 0071627928 (NetLibrary e-ISBN) 9780071741835 (McGraw-Hill e-ISBN) 0071741836 (McGraw-Hill e-ISBN)
Microelectromechanical systems
Microelectronic packaging
Description based on print version record
Includes bibliographical references and index
Enabling technologies for advanced MEMS packaging -- Advanced MEMS wafer-level packaging -- Optical MEMS packaging : communications -- Optical MEMS packaging : bubble switch -- Optical MEMS : microbolometer packaging -- Bio-MEMS packaging -- Biosensor packaging -- Accelerometer packaging -- Radiofrequency MEMS switches -- RF MEMS tunable capacitors and tubable band-pass filters -- Advanced packaging of RF MEMS devices
Mode of acceess : Internet
9780071627924 (NetLibrary e-ISBN) 0071627928 (NetLibrary e-ISBN) 9780071741835 (McGraw-Hill e-ISBN) 0071741836 (McGraw-Hill e-ISBN)
Microelectromechanical systems
Microelectronic packaging