Advanced MEMS packaging [electronic resource] / John H. Lau ... [et al.]

Contributor(s):

Lau, John H

Material type: Text

TextPublication details: New York : McGraw-Hill, c2010Description: 1 online resource (xxiii, 552 p.) : illISBN:

9780071627924 (NetLibrary e-ISBN)
0071627928 (NetLibrary e-ISBN)
9780071741835 (McGraw-Hill e-ISBN)
0071741836 (McGraw-Hill e-ISBN)

Subject(s):

Online resources:

NetLibrary

Contents:

Enabling technologies for advanced MEMS packaging -- Advanced MEMS wafer-level packaging -- Optical MEMS packaging : communications -- Optical MEMS packaging : bubble switch -- Optical MEMS : microbolometer packaging -- Bio-MEMS packaging -- Biosensor packaging -- Accelerometer packaging -- Radiofrequency MEMS switches -- RF MEMS tunable capacitors and tubable band-pass filters -- Advanced packaging of RF MEMS devices

Tags from this library: No tags from this library for this title. Log in to add tags.

Average rating: 0.0 (0 votes)

Holdings ( 1 )
Title notes ( 4 )

Holdings
Item type	Current library	Call number	Copy number	Status	Date due	Barcode
E-book	UMPLIB GAMBANG	TK7875 .A39 2010 (Browse shelf(Opens below))	1	Not for loan		0000055621

Description based on print version record

Includes bibliographical references and index

Mode of acceess : Internet