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Analysis and design principles of MEMS devices /

Bao, Minhang

Analysis and design principles of MEMS devices / by Mihang Bao - Amsterdam: Elsevier, 2005 - xii, 312 p.: ill.; 25 cm.

Includes bibliographical references and index

ISBN: 0444516166

Subjects--Topical Terms:
Microelectromechanical systems

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