Analysis and design principles of MEMS devices / by Mihang Bao

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Material type: Text

TextPublication details: Amsterdam: Elsevier, 2005Description: xii, 312 p.: ill.; 25 cmISBN:

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Holdings
Item type	Current library	Call number	Status	Date due	Barcode
Open Shelf	UMPLIB PEKAN	TK7875 .B36 2005 (Browse shelf(Opens below))	Available		0000012687

Includes bibliographical references and index