Foundations of MEMS /
Liu, Chang
Foundations of MEMS / Chang Liu - Upper Saddle River, NJ : Pearson, 2006 - xxii, 530 p. : ill. ; 25 cm.
Includes bibliographical references and index
0131472860
Microelectromechanical systems
Foundations of MEMS / Chang Liu - Upper Saddle River, NJ : Pearson, 2006 - xxii, 530 p. : ill. ; 25 cm.
Includes bibliographical references and index
0131472860
Microelectromechanical systems