Foundations of MEMS / Chang Liu

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Material type: Text

TextPublication details: Upper Saddle River, NJ : Pearson, 2006Description: xxii, 530 p. : ill. ; 25 cmISBN:

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Holdings
Item type	Current library	Call number	Copy number	Status	Notes	Date due	Barcode
Open Shelf	UMPLIB PEKAN	TK7875 .L58 2006 (Browse shelf(Opens below))	1	Available			0000014188
Open Shelf	UMPLIB PEKAN	TK7875 .L58 2006 (Browse shelf(Opens below))	2	Available	c.2		0000017590

Includes bibliographical references and index