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MEMS/MOEMS packaging : concepts, designs, materials, and processes /

Gilleo, Ken

MEMS/MOEMS packaging : concepts, designs, materials, and processes / Ken Gilleo - New York : McGraw-Hill, 2005 - xiii, 220 p. : ill. ; 24 cm. - McGraw-Hill nanoscience and technology series .

Includes bibliographical references (p. 203-213) and index

ISBN: 0071455566 9780071455565

Subjects--Topical Terms:
Microelectronic packaging
Microelectromechanical systems
Optoelectronic devices

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