MEMS/MOEMS packaging : concepts, designs, materials, and processes / Ken Gilleo

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Material type: Text

TextSeries: McGraw-Hill nanoscience and technology seriesPublication details: New York : McGraw-Hill, 2005Description: xiii, 220 p. : ill. ; 24 cmISBN:

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Holdings
Item type	Current library	Call number	Copy number	Status	Date due	Barcode
Open Shelf	UMPLIB PEKAN	TK7870.15 .G55 2005 (Browse shelf(Opens below))	1	Available		0000012064

Includes bibliographical references (p. 203-213) and index