Post-processing techniques for integrated MEMS /
Sedky, Sherif
Post-processing techniques for integrated MEMS / Sherif Sedky - Boston: Artech House, 2006 - xiv, 207p.: ill.; 24cm.
Includes bibliographical references and index
1580539017
Microelectromechanical systems
Post-processing techniques for integrated MEMS / Sherif Sedky - Boston: Artech House, 2006 - xiv, 207p.: ill.; 24cm.
Includes bibliographical references and index
1580539017
Microelectromechanical systems