Post-processing techniques for integrated MEMS / Sherif Sedky

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Material type: Text

TextPublication details: Boston: Artech House, 2006Description: xiv, 207p.: ill.; 24cmISBN:

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Holdings
Item type	Current library	Call number	Status	Date due	Barcode
Open Shelf	UMPLIB PEKAN	TK7875 .S42 2006 (Browse shelf(Opens below))	Available		0000015087

Includes bibliographical references and index