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Silicon micromachining /

Elwenspoek, M.

Silicon micromachining / M. Elwenspoek and H. V. Jansen - Cambridge: Cambridge University Press, 1998 - xiii, 405 p.: ill; 25 cm.

Includes bibliographical references and index

ISBN: 0521607671

Subjects--Topical Terms:
Silicon
Micromachining
Etching

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