Silicon micromachining / M. Elwenspoek and H. V. Jansen

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Material type: Text

TextPublication details: Cambridge: Cambridge University Press, 1998Description: xiii, 405 p.: ill; 25 cmISBN:

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Holdings
Item type	Current library	Call number	Status	Date due	Barcode
Open Shelf	UMPLIB PEKAN	TK7871.15.S55 E48 1998 (Browse shelf(Opens below))	Available		0000009794

Includes bibliographical references and index