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Tribology in chemical-mechanical planarization /

Liang, Hong

Tribology in chemical-mechanical planarization / Hong Liang, David Craven - Boca Raton, FL : Taylor & Francis, 2005 - 185 p. : ill. ; 25 cm.

ISBN: 0824725670

Subjects--Topical Terms:
Tribology
Grinding and polishing

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