Tribology in chemical-mechanical planarization / Hong Liang, David Craven

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Material type: Text

TextPublication details: Boca Raton, FL : Taylor & Francis, 2005Description: 185 p. : ill. ; 25 cmISBN:

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Holdings
Item type	Current library	Call number	Copy number	Status	Date due	Barcode
Open Shelf	UMPLIB PEKAN	TJ1075 .L53 2005 (Browse shelf(Opens below))	1	Available		0000018665