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Scientific wet process technology for innovative LSI/FPD manufacturing /

Scientific wet process technology for innovative LSI/FPD manufacturing / edited by Tadahiro Ohmi - Boca Raton : Taylor & Francis, 2006 - 386 p. : ill. ; 26 cm.

ISBN: 0849335434

Subjects--Topical Terms:
Semiconductors--Design and construction
Semiconductors--Cleaning
Integrated circuits--Design and construction

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