Scientific wet process technology for innovative LSI/FPD manufacturing / (Record no. 32150)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00870nam a2200229 a 4500 |
| 001 - CONTROL NUMBER | |
| control field | vtls000017414 |
| 003 - CONTROL NUMBER IDENTIFIER | |
| control field | KUKTEM |
| 005 - DATE AND TIME OF LATEST TRANSACTION | |
| control field | 20251117144232.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 070116 000 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0849335434 |
| 039 #9 - LEVEL OF BIBLIOGRAPHIC CONTROL AND CODING DETAIL [OBSOLETE] | |
| Level of rules in bibliographic description | 201107131855 |
| Level of effort used to assign nonsubject heading access points | VLOAD |
| Level of effort used to assign subject headings | 200908141252 |
| Level of effort used to assign classification | VLOAD |
| Level of effort used to assign subject headings | 200908141225 |
| Level of effort used to assign classification | VLOAD |
| Level of effort used to assign subject headings | 200908131647 |
| Level of effort used to assign classification | VLOAD |
| -- | 200701161032 |
| -- | kam |
| 040 ## - CATALOGING SOURCE | |
| Original cataloging agency | UMP |
| 090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN) | |
| Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) | TK7871.85 .S25 2006 |
| 245 00 - TITLE STATEMENT | |
| Title | Scientific wet process technology for innovative LSI/FPD manufacturing / |
| Statement of responsibility, etc. | edited by Tadahiro Ohmi |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. | |
| Place of publication, distribution, etc. | Boca Raton : |
| Name of publisher, distributor, etc. | Taylor & Francis, |
| Date of publication, distribution, etc. | 2006 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | 386 p. : |
| Other physical details | ill. ; |
| Dimensions | 26 cm. |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Semiconductors |
| General subdivision | Design and construction |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Semiconductors |
| General subdivision | Cleaning |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name entry element | Integrated circuits |
| General subdivision | Design and construction |
| 700 1# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Ohmi, Tadahiro |
| Withdrawn status | Lost status | Damaged status | Not for loan | Home library | Current library | Date acquired | Total checkouts | Full call number | Barcode | Date last seen | Copy number | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Not lost | UMPLIB PEKAN | UMPLIB PEKAN | 04/09/2019 | TK7871.85 .S25 2006 | 0000018740 | 04/09/2019 | 1 | 04/09/2019 | Open Shelf |