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Principles and applications of NanoMEMS physics /

Santos, Héctor J. de los

Principles and applications of NanoMEMS physics / by Héctor J. De Los Santos - Dordrecht, The Netherlands : Springer, c2005 - xv, 254 p. : ill. ; 25 cm. - Microsystems ; 15 .

Includes bibliographical references (p. [241]-252) and index

ISBN: 1402032382

Subjects--Topical Terms:
Quantum electronics
Wave-particle duality
Nanotechnology
Microelectromechanical systems

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