Principles and applications of NanoMEMS physics / by Héctor J. De Los Santos

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Material type: Text

TextSeries: Microsystems ; 15Publication details: Dordrecht, The Netherlands : Springer, c2005Description: xv, 254 p. : ill. ; 25 cmISBN:

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Holdings
Item type	Current library	Call number	Copy number	Status	Date due	Barcode
Open Shelf	UMPLIB GAMBANG	QC688 .S28 2005 (Browse shelf(Opens below))	1	Available		0000022909

Includes bibliographical references (p. [241]-252) and index