Micromanufacturing : international research and development /
Micromanufacturing : international research and development /
by Kornel F. Ehmann ... [et al.]
- Dordrecht : Springer, 2007
- 362 p. : ill. ; 25 cm.
Cover title: Micromanufacturing : international assessment of research and development
Introduction / Richard E. DeVor and Kornel F. Ehmann -- Design / Martin L. Culpepper and Thomas R. Kurfess -- Materials / David Bourell and Kamlakar Rajurkar -- Processes / Kamlakar Rajurkar and Marc Madou -- Metrology, sensors and control / Thomas R. Kurfess and Thom J. Hodgson -- Non-lithography applications / Marc Madou -- Business, education, the environment, and other issues / Thom J. Hodgson.
1402059485 9781402059483
Microfabrication
Micromachining
Cover title: Micromanufacturing : international assessment of research and development
Introduction / Richard E. DeVor and Kornel F. Ehmann -- Design / Martin L. Culpepper and Thomas R. Kurfess -- Materials / David Bourell and Kamlakar Rajurkar -- Processes / Kamlakar Rajurkar and Marc Madou -- Metrology, sensors and control / Thomas R. Kurfess and Thom J. Hodgson -- Non-lithography applications / Marc Madou -- Business, education, the environment, and other issues / Thom J. Hodgson.
1402059485 9781402059483
Microfabrication
Micromachining