Micromanufacturing : international research and development / by Kornel F. Ehmann ... [et al.]
Material type:
TextPublication details: Dordrecht : Springer, 2007Description: 362 p. : ill. ; 25 cmISBN: - 1402059485
- 9781402059483
| Item type | Current library | Call number | Copy number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|---|
Open Shelf
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UMPLIB PEKAN | TJ1191.5 .M53 2007 (Browse shelf(Opens below)) | 1 | Available | 0000026018 |
Cover title: Micromanufacturing : international assessment of research and development
Introduction / Richard E. DeVor and Kornel F. Ehmann -- Design / Martin L. Culpepper and Thomas R. Kurfess -- Materials / David Bourell and Kamlakar Rajurkar -- Processes / Kamlakar Rajurkar and Marc Madou -- Metrology, sensors and control / Thomas R. Kurfess and Thom J. Hodgson -- Non-lithography applications / Marc Madou -- Business, education, the environment, and other issues / Thom J. Hodgson.