Advanced Metallization Conference 2009 (AMC 2009) : proceedings of the Conference held October 13-15, 2009, Baltimore, Maryland, U.S.A. /
Advanced Metallization Conference 2009 (AMC 2009) : proceedings of the Conference held October 13-15, 2009, Baltimore, Maryland, U.S.A. /
AMC 2009
editors: Daniel C. Edelstein, Stefan E. Schulz
- Warrendale, Pa. : Materials Research Society, c2010
- xiii, 295 p. : ill. ; 24 cm.
- Materials Research Society conference proceedings .
- Materials Research Society conference proceedings .
"This Conference is affiliated with the Materials Research Society and sponsored by the Department of Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A." -- t.p.
Includes bibliographical references and indexes
9781605112183 1605112186
Semiconductors--Design and construction--Congresses
Integrated circuits--Ultra large scale integration--Design and construction--Congresses
Integrated circuits--Ultra large scale integration--Materials--Congresses
Thin films--Congresses
Metallic films--Congresses
Metallizing--Congresses
"This Conference is affiliated with the Materials Research Society and sponsored by the Department of Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A." -- t.p.
Includes bibliographical references and indexes
9781605112183 1605112186
Semiconductors--Design and construction--Congresses
Integrated circuits--Ultra large scale integration--Design and construction--Congresses
Integrated circuits--Ultra large scale integration--Materials--Congresses
Thin films--Congresses
Metallic films--Congresses
Metallizing--Congresses