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Advanced Metallization Conference 2009 (AMC 2009) : proceedings of the Conference held October 13-15, 2009, Baltimore, Maryland, U.S.A. / editors: Daniel C. Edelstein, Stefan E. Schulz
Material type:
TextSeries: Materials Research Society conference proceedingsPublication details: Warrendale, Pa. : Materials Research Society, c2010Description: xiii, 295 p. : ill. ; 24 cmISBN: - 9781605112183
- 1605112186
- AMC 2009
- Semiconductors -- Design and construction -- Congresses
- Integrated circuits -- Ultra large scale integration -- Design and construction -- Congresses
- Integrated circuits -- Ultra large scale integration -- Materials -- Congresses
- Thin films -- Congresses
- Metallic films -- Congresses
- Metallizing -- Congresses
| Item type | Current library | Call number | Copy number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|---|
Open Shelf
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UMPLIB PEKAN | TK7871.85 .A38 2010 (Browse shelf(Opens below)) | 1 | Available | 0000066524 |
"This Conference is affiliated with the Materials Research Society and sponsored by the Department of Continuing Education in Engineering, University Extension, University of California at Berkeley, California, U.S.A." -- t.p.
Includes bibliographical references and indexes