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MEMS and microsystems : design, manufacture, and packaging /

Hsu, Tai-Ran.

MEMS and microsystems : design, manufacture, and packaging / Tai-Ran Hsu. - 2nd ed. - Hoboken, NJ : John Wiley, c2008. - xxv, 550 p. : ill. ; 24 cm.

Includes bibliographical references and index.

ISBN: 9780470083017 (cloth)

LCCN: 2007-017041

Subjects--Topical Terms:
Microelectronics.
Microelectromechanical systems.
Microelectronic packaging.

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