MEMS and microsystems : design, manufacture, and packaging / Tai-Ran Hsu.

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Material type: Text

TextPublication details: Hoboken, NJ : John Wiley, c2008.Edition: 2nd edDescription: xxv, 550 p. : ill. ; 24 cmISBN:

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Holdings
Item type	Current library	Call number	Copy number	Status	Date due	Barcode
Open Shelf	UMPLIB PEKAN	TK7874 .H79 2008 (Browse shelf(Opens below))	1	Available		0000032376

Includes bibliographical references and index.