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Scaling issues and design of MEMS /

Baglio, S

Scaling issues and design of MEMS / Scaling issues and design of microelectromechanical systems Salvatore Baglio, Salvatore Castorina, Nicolò Savalli. - Chichester, West Sussex, England ; Hoboken, NJ : John Wiley & Sons, c2007. - xiii, 229 p. : ill. ; 24 cm.

Includes bibliographical references and index.

ISBN: 9780470016992 047001699X

Subjects--Topical Terms:
Microelectromechanical systems--Design and construction.

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