Scaling issues and design of MEMS / Salvatore Baglio, Salvatore Castorina, Nicolò Savalli.

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Material type: Text

TextPublication details: Chichester, West Sussex, England ; Hoboken, NJ : John Wiley & Sons, c2007.Description: xiii, 229 p. : ill. ; 24 cmISBN:

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Holdings
Item type	Current library	Call number	Copy number	Status	Date due	Barcode
Open Shelf	UMPLIB PEKAN	TK7875 .B34 2007 (Browse shelf(Opens below))	1	Available		0000033924

Includes bibliographical references and index.