Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. /
Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. /
editors by R. P. H. Chang, B. Abeles
- Pittsburgh, PA : Materials Research Society, c1985
- xv, 522 p. : ill. ; 24 cm.
- Materials Research Society symposia proceedings ; v. 38 .
- Materials Research Society symposia proceedings .
Includes bibliographies references and index
9780931837036 0931837030
Plasma engineering--Congresses
Plasma etching--Congresses
Electronics--Materials--Congresses
Includes bibliographies references and index
9780931837036 0931837030
Plasma engineering--Congresses
Plasma etching--Congresses
Electronics--Materials--Congresses