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Plasma synthesis and etching of electronic materials : symposium held November 27-30, 1984, Boston, Massachusetts, U.S.A. / editors by R. P. H. Chang, B. Abeles
Material type:
TextSeries: Materials Research Society symposia proceedingsPublication details: Pittsburgh, PA : Materials Research Society, c1985Description: xv, 522 p. : ill. ; 24 cmISBN: - 9780931837036
- 0931837030
| Item type | Current library | Call number | Copy number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|---|
Open Shelf
|
UMPLIB PEKAN | TA2005 .P53 1985 (Browse shelf(Opens below)) | 1 | Available | 0000072123 |
Includes bibliographies references and index