CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A. /
CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A. /
editors, Tsu-Jae King ... [et al.]
- Warrendale, PA : Materials Research Society, c2003
- xi, 308 p. : ill. ; 24 cm.
- Materials Research Society symposia proceedings ; v. 765 .
Includes bibliographical references and indexes
9781558997028 1558997024
Metal oxide semiconductors--Materials--Congresses
Metal oxide semiconductors, Complementary--Materials--Congresses
Nanostructured materials--Congresses
Gate array circuits--Materials--Congresses
Dielectrics--Congresses
Includes bibliographical references and indexes
9781558997028 1558997024
Metal oxide semiconductors--Materials--Congresses
Metal oxide semiconductors, Complementary--Materials--Congresses
Nanostructured materials--Congresses
Gate array circuits--Materials--Congresses
Dielectrics--Congresses