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CMOS front-end materials and process technology : symposium held April 22-24, 2003, San Francisco, California, U.S.A. / editors, Tsu-Jae King ... [et al.]
Material type:
TextSeries: Materials Research Society symposia proceedings ; v. 765Publication details: Warrendale, PA : Materials Research Society, c2003Description: xi, 308 p. : ill. ; 24 cmISBN: - 9781558997028
- 1558997024
| Item type | Current library | Call number | Copy number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|---|
Open Shelf
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UMPLIB GAMBANG | TK7871.99.M44 C56 2003 (Browse shelf(Opens below)) | 1 | Available | 0000068201 |
Includes bibliographical references and indexes