Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A. /
Advances and challenges in chemical mechanical planarization : symposium held April 10-12, 2007, San Francisco, California, U.S.A. /
editors, Gerfried Zwicker ... [et al.]
- Warrendale, PA. : Materials Research Society, 2007
- xi, 371 p. : ill. ; 24 cm.
- Materials Research Society symposium proceedings ; v. 991 .
- Materials Research Society symposium proceedings ; v. 991 .
"Proceedings ... presented at Symposium C, ’Advances and Challenges in Chemical Mechanical Planarization,’ held April 10-12 at the 2007 MRS Spring Meeting"--Pref.
Includes bibliographical references and indexes
1558999515 9781558999510
Semiconductors--Materials--Congresses
Semiconductors--Surfaces--Congresses
Chemical mechanical planarization--Congresses
"Proceedings ... presented at Symposium C, ’Advances and Challenges in Chemical Mechanical Planarization,’ held April 10-12 at the 2007 MRS Spring Meeting"--Pref.
Includes bibliographical references and indexes
1558999515 9781558999510
Semiconductors--Materials--Congresses
Semiconductors--Surfaces--Congresses
Chemical mechanical planarization--Congresses