MARC details
| 000 -LEADER |
|---|
| fixed length control field |
01535nam a2200301 a 4500 |
| 001 - CONTROL NUMBER |
|---|
| control field |
vtls000060092 |
| 003 - CONTROL NUMBER IDENTIFIER |
|---|
| control field |
KUKTEM |
| 005 - DATE AND TIME OF LATEST TRANSACTION |
|---|
| control field |
20251117145445.0 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION |
|---|
| fixed length control field |
120523t2007 paua f 001 0 eng d |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
1558999515 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER |
|---|
| International Standard Book Number |
9781558999510 |
| 039 #9 - LEVEL OF BIBLIOGRAPHIC CONTROL AND CODING DETAIL [OBSOLETE] |
|---|
| Level of rules in bibliographic description |
201211281204 |
| Level of effort used to assign nonsubject heading access points |
asmadi |
| Level of effort used to assign subject headings |
201205231008 |
| Level of effort used to assign classification |
safura |
| -- |
201205231006 |
| -- |
safura |
| 040 ## - CATALOGING SOURCE |
|---|
| Original cataloging agency |
UMP |
| 090 ## - LOCALLY ASSIGNED LC-TYPE CALL NUMBER (OCLC); LOCAL CALL NUMBER (RLIN) |
|---|
| Classification number (OCLC) (R) ; Classification number, CALL (RLIN) (NR) |
TK7871.85 .S96 2007 |
| 111 2# - MAIN ENTRY--MEETING NAME |
|---|
| Meeting name or jurisdiction name as entry element |
Symposium C, "Advances and Challenges in Chemical Mechanical Planarization" d (2007 : c San Francisco, Calif.) |
| 245 00 - TITLE STATEMENT |
|---|
| Title |
Advances and challenges in chemical mechanical planarization : |
| Remainder of title |
symposium held April 10-12, 2007, San Francisco, California, U.S.A. / |
| Statement of responsibility, etc. |
editors, Gerfried Zwicker ... [et al.] |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. |
|---|
| Place of publication, distribution, etc. |
Warrendale, PA. : |
| Name of publisher, distributor, etc. |
Materials Research Society, |
| Date of publication, distribution, etc. |
2007 |
| 300 ## - PHYSICAL DESCRIPTION |
|---|
| Extent |
xi, 371 p. : |
| Other physical details |
ill. ; |
| Dimensions |
24 cm. |
| 490 1# - SERIES STATEMENT |
|---|
| Series statement |
Materials Research Society symposium proceedings ; |
| Volume/sequential designation |
v. 991 |
| 500 ## - GENERAL NOTE |
|---|
| General note |
"Proceedings ... presented at Symposium C, ’Advances and Challenges in Chemical Mechanical Planarization,’ held April 10-12 at the 2007 MRS Spring Meeting"--Pref. |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE |
|---|
| Bibliography, etc. note |
Includes bibliographical references and indexes |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Semiconductors |
| General subdivision |
Materials |
| Form subdivision |
Congresses |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Semiconductors |
| General subdivision |
Surfaces |
| Form subdivision |
Congresses |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM |
|---|
| Topical term or geographic name entry element |
Chemical mechanical planarization |
| Form subdivision |
Congresses |
| 700 1# - ADDED ENTRY--PERSONAL NAME |
|---|
| Personal name |
Zwicker, Gerfried |
| 830 #0 - SERIES ADDED ENTRY--UNIFORM TITLE |
|---|
| Uniform title |
Materials Research Society symposium proceedings ; |
| Volume/sequential designation |
v. 991 |