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Chemical-Mechanical Polishing 2000 : fundamentals and materials issues : symposium held April 26-27, 2000, San Francisco, California, U.S.A. /

Chemical-Mechanical Polishing 2000 : fundamentals and materials issues : symposium held April 26-27, 2000, San Francisco, California, U.S.A. / editors, Rajiv K. Singh ... [et al.] - Warrendale, PA : Materials Research Society, c2001 - 1 v. (various pagings) : ill. ; 24 cm. - Materials Research Society symposium proceedings ; v. 613 . - Materials Research Society symposia proceedings ; v. 613 .

Includes bibliographical references and indexes

ISBN: 9781558995215 1558995218

Subjects--Topical Terms:
Electrolytic polishing--Congresses
Grinding and polishing--Congresses
Chemical mechanical planarization--Congresses

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