Chemical-Mechanical Polishing 2000 : fundamentals and materials issues : symposium held April 26-27, 2000, San Francisco, California, U.S.A. / editors, Rajiv K. Singh ... [et al.]

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Material type: Text

TextSeries: Materials Research Society symposia proceedings ; v. 613Publication details: Warrendale, PA : Materials Research Society, c2001Description: 1 v. (various pagings) : ill. ; 24 cmISBN:

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Holdings
Item type	Current library	Call number	Copy number	Status	Date due	Barcode
Open Shelf	UMPLIB PEKAN	TS654.5 .C44 2001 (Browse shelf(Opens below))	1	Available		0000068169

Includes bibliographical references and indexes