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Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A. /

Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A. / editors by Maarten P. de Boer ... [et al.] - Warrendale, PA : Materials Research Society, c2000 - xiii, 314 p. : ill. ; 23 cm. - Materials Research Society symposium proceedings ; v. 605 . - Materials Research Society symposium proceedings .

Includes bibliographical references and index

ISBN: 1558995137

Subjects--Topical Terms:
Microelectromechanical systems--Congresses
Microelectronics--Materials--Congresses
Microactuators--Materials--Congresses

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