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Materials science of microelectromechanical systems (MEMS) devices II : symposium held November 29-December 1, 1999, Boston, Massachusetts, U.S.A. / editors by Maarten P. de Boer ... [et al.]
Material type:
TextSeries: Materials Research Society symposium proceedingsPublication details: Warrendale, PA : Materials Research Society, c2000Description: xiii, 314 p. : ill. ; 23 cmISBN: - 1558995137
| Item type | Current library | Call number | Copy number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|---|
Open Shelf
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UMPLIB PEKAN | TK7875 .M38 2000 (Browse shelf(Opens below)) | 1 | Available | 0000073283 |
Includes bibliographical references and index