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Plasma electronics : applications in microelectronic device fabrication /

Makabe, T.

Plasma electronics : applications in microelectronic device fabrication / T. Makabe, Z. Petrović - New York : Taylor & Francis, 2006 - 339 p. : ill. ; 25 cm. - Series in plasma physics . - Series in plasma physics .

Includes bibliographical references and index

ISBN: 9780750309769 0750309768

Subjects--Topical Terms:
Plasma engineering

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