Plasma electronics : applications in microelectronic device fabrication / T. Makabe, Z. Petrović

By:

Contributor(s):

Material type: Text

TextSeries: Series in plasma physicsPublication details: New York : Taylor & Francis, 2006Description: 339 p. : ill. ; 25 cmISBN:

Subject(s):

Tags from this library: No tags from this library for this title. Log in to add tags.

Average rating: 0.0 (0 votes)

Holdings
Item type	Current library	Call number	Copy number	Status	Date due	Barcode
Open Shelf	UMPLIB PEKAN	TA2020 .M35 2006 (Browse shelf(Opens below))	1	Available		0000046676

Includes bibliographical references and index