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Dielectric films for advanced microelectronics /

Dielectric films for advanced microelectronics / edited by Mikhail Baklanov, Martin Green, and Karen Maex - Chichester, England ; Hoboken, NJ : John Wiley & Sons, c2007 - xxii, 486 p. : ill. ; 26 cm. - Wiley series in materials for electronic and optoelectronic applications . - Wiley series in materials for electronic and optoelectronic applications .

Includes bibliographical references and index

ISBN: 9780470013601 (hbk.) 0470013605 (hbk.)

Subjects--Topical Terms:
Dielectric films
Microelectronics--Materials

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