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Dielectric films for advanced microelectronics / edited by Mikhail Baklanov, Martin Green, and Karen Maex
Material type:
TextSeries: Wiley series in materials for electronic and optoelectronic applicationsPublication details: Chichester, England ; Hoboken, NJ : John Wiley & Sons, c2007Description: xxii, 486 p. : ill. ; 26 cmISBN: - 9780470013601 (hbk.)
- 0470013605 (hbk.)
| Item type | Current library | Call number | Copy number | Status | Date due | Barcode | |
|---|---|---|---|---|---|---|---|
Open Shelf
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UMPLIB PEKAN | TK7871.15.F5 D54 2007 (Browse shelf(Opens below)) | 1 | Available | 0000041074 |
Includes bibliographical references and index